SHIMADZU

SHIMADZU MSE-2600 Transportable General-Purpose Helium/Hydrogen Mass Spectrometer Leak Detector

The SHIMADZU MSE-2600 is a transportable general-purpose mass spectrometer leak detector designed for a wide range of applications, from equipment maintenance to integration into automated inspection systems. It supports both helium and hydrogen as tracer gases. Its helium detection sensitivity is less than 8.00 × 10⁻¹³ Pa·m³/s. The helium leak-rate display range is 10⁻¹³ to 10⁰ Pa·m³/s, while the hydrogen range is 10⁻⁹ to 10⁰ Pa·m³/s, allowing quantitative measurement of both very small and relatively large leaks. The MSE-2600 incorporates SHIMADZU's 270° deflection analysis tube, two yttria-coated iridium filaments, and temperature-compensated automatic sensitivity tuning. The 270° analysis design contributes to high measurement accuracy and strong background recovery performance. Its vacuum system combines a molecular drag pump and an oil rotary vacuum pump. The helium pumping speed at the test port is 5.2 L/s, helping reduce response and background-recovery time during leak inspection.

CategoryLeak detection equipment
BrandSHIMADZU
ColorBlackblack
Specification52kg/台
ApplicationA transportable mass spectrometer leak detector for high-sensitivity helium or hydrogen leak testing of vacuum equipment, automotive components, semiconductor equipment, electronic devices and hermetically sealed products.

Product Details

Product Features

High Detection Sensitivity:Helium sensitivity of <8.00 × 10⁻¹³ Pa·m³/s supports quantitative detection of extremely small leaks. 

Helium and Hydrogen Detection:Supports both helium and hydrogen tracer gases for flexible leak-test processes. 

270° Deflection Analysis Tube:SHIMADZU's 270° mass-analysis design provides high ion selectivity and accurate measurements. 

5.2 L/s Helium Pumping Speed:High test-port helium pumping speed helps reduce inspection and recovery time. 

Transportable General-Purpose Design:The main unit weighs approximately 52 kg, making it suitable for field maintenance as well as system integration. 

Automation-Friendly Interfaces:RS-232C, RS-485, EXT-UNIT and configurable digital I/O allow connection to automated inspection systems. 

 

Product Applications

Vacuum Equipment Maintenance:For leak inspection of vacuum systems, vacuum furnaces, piping and related equipment.

Welded Pipes and Hermetic Components:Suitable for vacuum spray testing of welded piping, flexible tubes and hermetic seals. 

Semiconductor and Electronic Equipment:For semiconductor manufacturing equipment and electronic products requiring high leak tightness. 

Automotive Components:Suitable for air-conditioning systems, battery-related components and other automotive parts requiring airtightness. 

Compressors and Heat Exchangers:With the sniffer method, the system can inspect components that cannot be evacuated, including compressors, heat exchangers and condensers. 

Automated Production Lines:Communication interfaces and digital I/O make the MSE-2600 suitable for integration into automated leak-test equipment and manufacturing lines.

Item SHIMADZU MSE-2600
Product Type Transportable General-Purpose Helium/Hydrogen Mass Spectrometer Leak Detector
Brand SHIMADZU
Model MSE-2600
Detection Gas Helium / Hydrogen
Helium Detection Sensitivity <8.00 × 10⁻¹³ Pa·m³/s
Helium Leak Rate Display Range 10⁻¹³ to 10⁰ Pa·m³/s
Hydrogen Leak Rate Display Range 10⁻⁹ to 10⁰ Pa·m³/s
Analysis Tube 270° Deflection Type
Magnetic Flux Density 0.17 T
Filament Yttria-Coated Iridium × 2
Sensitivity Calibration Temperature-Compensated Automatic Tuning
High-Vacuum Pump Molecular Drag Pump
Molecular Drag Pump Structure 70 L/s
Fore Pump Oil Rotary Vacuum Pump
Fore Pump Capacity 30 L/min at 50 Hz
Vacuum Gauge 2 Pirani Gauge Systems
Maximum Test-Port Pressure 1,000 Pa
Test-Port Connection NW25KF
Helium Pumping Speed 5.2 L/s
Main Unit Mass Approx. 52 kg
Power Supply AC 100/110/120/200/220/230/240 V
Frequency 50/60 Hz
Voltage Tolerance ±10%
Power Consumption 400 VA
Communication RS-232C / RS-485
External Interface EXT-UNIT
Digital I/O 4 Inputs / 12 Outputs, NPN/PNP Selectable
Typical Applications Maintenance, Vacuum Leak Testing, Airtightness Inspection, Production-Line Integration