SHIMADZU MSE-2601 Compact General-Purpose Dry Helium/Hydrogen Mass Spectrometer Leak Detector
The SHIMADZU MSE-2601 is a compact, transportable, general-purpose mass spectrometer leak detector equipped with a built-in non-contact dry vacuum pump. It is designed for a wide range of applications, from equipment maintenance to integration into inspection systems, and is particularly suitable for clean-room environments. The MSE-2601 supports both helium and hydrogen as tracer gases. Its helium detection sensitivity is less than 8.00 × 10⁻¹³ Pa·m³/s, with a helium leak-rate display range from 10⁻¹³ to 10⁰ Pa·m³/s, making it suitable for quantitative detection of extremely small leaks. It incorporates SHIMADZU's characteristic 270° deflection analysis tube with a magnetic flux density of 0.17 T and two yttria-coated iridium filaments. The 270° ion-path design improves separation of unwanted ions and enables highly accurate leak measurement. The vacuum system combines a molecular drag pump with a non-contact dry vacuum pump. A helium pumping speed of 5.2 L/s at the test port helps improve response and background recovery. Communication interfaces and digital I/O also make the instrument suitable for automated inspection equipment and production-line integration.
Product Details
Product Features
High Detection Sensitivity:
Helium sensitivity of <8.00 × 10⁻¹³ Pa·m³/s enables detection of very small leaks.
Helium and Hydrogen Detection:
Supports both helium and hydrogen tracer gases.
270° Deflection Analysis Tube:
SHIMADZU's 270° analysis-tube design provides high ion selectivity and precise measurement.
5.2 L/s Helium Pumping Speed:
High helium pumping speed helps reduce measurement and background-recovery time.
Built-In Dry Vacuum Pump:
The non-contact dry pump makes the instrument well suited for clean-room applications.
Compact and Transportable:
With a main-unit mass of approximately 58 kg, the MSE-2601 can be used for both field maintenance and system integration.
Automation Interfaces:
RS-232C, RS-485, EXT-UNIT and configurable I/O facilitate connection to automated inspection systems.
Product Applications
Vacuum Equipment:
For leak inspection and maintenance of vacuum coating systems, vacuum furnaces and other vacuum equipment.
Semiconductor and Electronic Components:
Suitable for semiconductor equipment and sealed electronic components requiring high leak-tightness.
Automotive Components:
Applicable to battery housings, air-conditioning components and other automotive parts requiring reliable sealing.
Welded and Hermetic Components:
Suitable for welded piping, flexible tubes and hermetic seals using vacuum spray testing.
Compressors and Heat Exchangers:
With the optional sniffer unit, it can be used for components that cannot be evacuated, including compressors, heat exchangers and condensers.
Automated Inspection Systems:
Can be integrated into automated leak-test equipment and manufacturing lines through communication and digital I/O interfaces.
| Item | SHIMADZU MSE-2601 |
|---|---|
| Product Type | Dry Helium/Hydrogen Mass Spectrometer Leak Detector |
| Brand | SHIMADZU |
| Model | MSE-2601 |
| Configuration | Compact Transportable General-Purpose Model |
| Detection Gas | Helium / Hydrogen |
| Helium Detection Sensitivity | <8.00 × 10⁻¹³ Pa·m³/s |
| Helium Leak Rate Display Range | 10⁻¹³ to 10⁰ Pa·m³/s |
| Hydrogen Leak Rate Display Range | 10⁻⁹ to 10⁰ Pa·m³/s |
| Analysis Tube | 270° Deflection Type |
| Magnetic Flux Density | 0.17 T |
| Filament | Yttria-Coated Iridium, 2 Built-In |
| Sensitivity Calibration | Temperature-Compensated Automatic Tuning |
| High-Vacuum Pump | Molecular Drag Pump, 70 L/s Exhaust Structure |
| Fore Pump | Non-Contact Dry Vacuum Pump |
| Dry Pump Capacity | 110 L/min |
| Vacuum Gauge | 2 Pirani Gauge Systems |
| Maximum Test-Port Pressure | 1,000 Pa |
| Test-Port Connection | NW25KF |
| Helium Pumping Speed | 5.2 L/s |
| Main Unit Mass | Approx. 58 kg |
| Power Supply | AC 100/110/120/200/220/230/240 V, selected at order |
| Power Tolerance | ±10%, 50/60 Hz |
| Power Consumption | 700 VA |
| Communication | RS-232C / RS-485 |
| External Interface | EXT-UNIT |
| Digital I/O | 4 Inputs / 12 Outputs, NPN/PNP Selectable |
| Typical Applications | Maintenance, Vacuum Leak Testing, Production-Line Integration, Clean Rooms |
