NOK Klüber BARRIERTA BFV 402 Ultra-Low-Outgassing High-Vacuum Fluorinated Grease
BARRIERTA BFV 402 is an ultra-low-outgassing fluorinated grease developed by NOK Klüber for semiconductor manufacturing and severe high-vacuum environments. In advanced semiconductor processes, outgassing and grease contamination can affect wafer cleanliness and production yield, so BFV 402 is specifically designed to help maintain a stable and clean vacuum environment. The product uses a fluorinated base oil with PTFE thickener, is white in color, and has an NLGI grade of 2. NOK Klüber’s official product catalog lists a service temperature range of approximately -35°C to 260°C. BFV 402 is also designed to minimize metal contamination. Official information highlights ultra-low outgassing, reduced base-oil scattering, low particle generation, and a metal-element-free manufacturing concept, helping reduce contamination-related defects in semiconductor processes.
Product Details
Product Features
Ultra-Low Outgassing:Optimized for high-vacuum environments to reduce grease evaporation and contamination.
Low Particle Generation:Helps suppress contamination caused by base-oil scattering.
Metal-Contamination Control:Produced without metal-element contamination, helping reduce risks to device characteristics and process quality.
High Temperature Capability:Service temperature range of approximately -35°C to 260°C.
PFPE/PTFE System:Fluorinated oil and PTFE thickener provide excellent stability for vacuum and high-temperature applications.
Extremely Low Moisture Content:NOK data for battery manufacturing applications shows moisture content below the detection limit, making the grease suitable for low-dew-point environments.
Product Applications
Semiconductor Manufacturing Equipment:Lubrication in high-cleanliness, high-vacuum semiconductor production systems.
Vacuum Pumps:Lubrication of moving and sliding components requiring low evaporation.
Etching Equipment:Suitable for lubrication points in high-vacuum etching systems.
Wafer Transfer Robots:For bearings, guides, lead screws and gears in wafer-handling mechanisms.
Optical Equipment:Helps reduce fogging risk caused by lubricant outgassing in vacuum optical systems.
Low-Dew-Point Equipment:Suitable for sliding components in lithium-ion battery production and other moisture-sensitive environments.
| Item | BARRIERTA BFV 402 |
|---|---|
| Product Type | Ultra-Low-Outgassing High-Vacuum Fluorinated Grease |
| Brand | BARRIERTA / NOK Klüber |
| Model | BFV 402 |
| Base Oil | Fluorinated Oil / PFPE Type |
| Thickener | PTFE |
| Color | White |
| NLGI Grade | 2 |
| Service Temperature Range | -35°C to 260°C |
| Vacuum Performance | Ultra-Low Outgassing |
| Cleanliness | Low Particle Generation |
| Metal Contamination | Metal-Element-Free Manufacturing Concept |
| Moisture Content | Below Detection Limit in NOK Evaluation |
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